Coupled resonator filter and fabrication method thereof

Details Coupled resonator filter and fabrication method thereof Coupled resonator filter and fabrication method thereof

2006-06-19

2009-06-16

Chang, Daniel D (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000

Reexamination Certificate

active

07548139

ABSTRACT:
A coupled resonator filter and a method of fabricating the coupled resonator filter are provided. The method includes: sequentially stacking a first electrode, a first piezoelectric layer, a second electrode, an insulating layer, a third electrode, a second piezoelectric layer, and a fourth electrode on a surface of a substrate; sequentially patterning the first electrode, the first piezoelectric layer, the second electrode, the insulating layer, the third electrode, the second piezoelectric layer, and the fourth electrode to expose areas of the first, second, and third electrodes; forming a plurality of connection electrodes respectively connected to the exposed areas of the first, second, and third electrodes and an area of the fourth electrode; and etching an area of the substrate underneath the first electrode to form an air gap.

REFERENCES:
patent: 6670866 (2003-12-01), Ellä et al.
patent: 7053730 (2006-05-01), Park et al.
patent: 7233218 (2007-06-01), Park et al.
patent: 2006/0202769 (2006-09-01), Nagao et al.
patent: 2002-271897 (2002-09-01), None

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