Stock material or miscellaneous articles – Plural parts with edges or temporary joining means each...
Patent
1990-06-07
1993-03-09
Robinson, Ellis P.
Stock material or miscellaneous articles
Plural parts with edges or temporary joining means each...
428469, 428472, 4284722, 428701, B32B 1504, B32B 1520
Patent
active
051926105
ABSTRACT:
A corrosion-resistant protective coating on an aluminum substrate capable of withstanding corrosion attack by process halogen gases and plasmas is disclosed. The protective coating is formed by contacting an aluminum oxide layer on an aluminum substrate with one or more fluorine-containing gases at an elevated temperature. In a preferred embodiment, a high purity corrosion-resistant protective coating on an aluminum substrate capable of withstanding corrosion attack may be formed by first forming a high purity aluminum oxide layer on the aluminum substrate and then contacting the aluminum oxide layer with one or more high purity fluorine-containing gases at an elevated temperature to form the high purity corrosion resistant protective coating thereon.
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Bercaw Craig A.
Lorimer D'Arcy H.
Applied Materials Inc.
Robinson Ellis P.
Taylor John P.
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