Corrosion resistant apparatus

Details Corrosion resistant apparatus Corrosion resistant apparatus

1995-10-12

1999-04-06

Dutton, Brian

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C23C 1600

Patent

active

058912533

ABSTRACT:
An apparatus used for processing substrates in a corrosive process gas is rendered substantially resistant to corrosion, by coating processing components exposed to the corrosive process gas with a coating comprising rhodium. The rhodium coating can be deposited by electroplating, and preferably has a thickness of at least about 10 microinches. A coating of nickel can be also applied between the rhodium coating and the processing component.

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