Corrosion-resistant apparatus

Details Corrosion-resistant apparatus Corrosion-resistant apparatus

1993-05-14

1996-06-04

Fourson, George

Coating apparatus

Gas or vapor deposition

C23C 1600

Patent

active

055229328

ABSTRACT:
A metal structure, such as an apparatus used in plasma processing of substrates, is rendered resistant to corrosion by coating components exposed to the plasma with a coating of rhodium. The rhodium coating can be made by electroplating, and preferably has a thickness of at least about 10 microinches, and preferably from about 10 to about 100 microinches. A coating of nickel can be applied between the rhodium coating and the metal component.

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