Corrosion-resistant aluminum component having multi-layer...

Details Corrosion-resistant aluminum component having multi-layer... Corrosion-resistant aluminum component having multi-layer...

2005-01-18

2010-06-08

Zimmerman, John J (Department: 1794)

Stock material or miscellaneous articles

Composite

Of metal

C428S701000, C204S192150, C205S201000, C205S208000, C205S324000

Reexamination Certificate

active

07732056

ABSTRACT:
A method of providing a corrosion-resistant coating on a surface of an aluminum component comprises anodizing the surface of the aluminum component to form an anodized aluminum oxide layer and sputter coating a sputtered layer on the anodized aluminum oxide layer. A coated aluminum component can be used in a substrate processing chamber and comprises an aluminum body, an anodized aluminum oxide layer formed on the aluminum body, and a sputtered layer comprising aluminum oxide on the anodized aluminum oxide layer.

REFERENCES:
patent: 3616310 (1971-10-01), Dorsey, Jr.
patent: 4606796 (1986-08-01), Hanazima et al.
patent: 4862799 (1989-09-01), Hycner et al.
patent: 5104514 (1992-04-01), Quartarone
patent: 5290424 (1994-03-01), Mozelewski et al.
patent: 5314601 (1994-05-01), Hardee et al.
patent: 5366585 (1994-11-01), Robertson et al.
patent: 5401573 (1995-03-01), Babel et al.
patent: 5756222 (1998-05-01), Bercaw et al.
patent: 5804253 (1998-09-01), Hagiwara et al.
patent: 5811195 (1998-09-01), Bercaw et al.
patent: 5856236 (1999-01-01), Lai et al.
patent: 5858464 (1999-01-01), Littau et al.
patent: 6117772 (2000-09-01), Murzin et al.
patent: 6159618 (2000-12-01), Danroc et al.
patent: 6355554 (2002-03-01), Choi et al.
patent: 6368880 (2002-04-01), Singhvi et al.
patent: 6458683 (2002-10-01), Lee
patent: 6458684 (2002-10-01), Guo et al.
patent: 6471879 (2002-10-01), Hanson et al.
patent: 6537905 (2003-03-01), Chen et al.
patent: 6565984 (2003-05-01), Wu et al.
patent: 6592707 (2003-07-01), Shih et al.
patent: 6649031 (2003-11-01), Iqbal et al.
patent: 6649039 (2003-11-01), Hsu et al.
patent: 6659331 (2003-12-01), Thach et al.
patent: 6672917 (2004-01-01), Matsuda et al.
patent: 6713188 (2004-03-01), Wu et al.
patent: 6776873 (2004-08-01), Sun et al.
patent: 2002/0012022 (2002-01-01), Fassler et al.
patent: 2002/0148941 (2002-10-01), Sorokov et al.
patent: 2003/0047464 (2003-03-01), Sun et al.
patent: 2003/0150530 (2003-08-01), Lin et al.
patent: 2003/0205479 (2003-11-01), Lin et al.
patent: 2004/0129574 (2004-07-01), Kia et al.
patent: 2005/0037193 (2005-02-01), Sun et al.
Derwent abstract for SU 1797027, pub. Feb. 23, 1993.
Lowenheim, Frederick, Modern Electroplating, Chapter 30 “Anodizing”, pp. 632-641.
Lowenheim, Frederick, Modern Electroplating, Chapter 30 “Anodizing”, pp. 632-641, copyright 1942.

Affiliated with

Also associated with

Rating

Corrosion-resistant aluminum component having multi-layer... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Corrosion-resistant aluminum component having multi-layer..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Corrosion-resistant aluminum component having multi-layer... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4249780