Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
Patent
1994-08-15
1998-05-26
Thibodeau, Paul J.
Stock material or miscellaneous articles
All metal or with adjacent metals
Composite; i.e., plural, adjacent, spatially distinct metal...
428650, 428215, 428336, 428469, 428696, 428701, B32B 904, B32B 1504, B32B 1520, B32B 1800
Patent
active
057562229
ABSTRACT:
Corrosion of an aluminum article exposed to corrosive halogen-containing species within semiconductor processing apparatus is avoided by fabricating the aluminum article from a high purity aluminum-magnesium alloy having a magnesium content of about 0.1% to 1.5% by weight, either throughout the entire article or at least in the surface region which is to be rendered corrosion-resistant, and a mobile impurity atom content of less than 0.2% by weight. Upon exposure of the article to a halogen-containing species, a protective magnesium halide layer is formed beneath the surface of the article. The protective layer prevents halogens from penetrating to the base aluminum, thereby protecting the article from corrosion and cracking. To protect the magnesium layer from abrasion, the article preferably also includes a hard, cohesive coating over the magnesium halide layer. A preferred cohesive coating is aluminum oxide or aluminum nitride.
REFERENCES:
patent: 3784371 (1974-01-01), Bangs et al.
patent: 4551211 (1985-11-01), Kobayashi et al.
patent: 4872947 (1989-10-01), Wang et al.
patent: 4978432 (1990-12-01), Schmeling et al.
patent: 5039388 (1991-08-01), Miyashita et al.
patent: 5069938 (1991-12-01), Lorimer et al.
patent: 5158644 (1992-10-01), Cheung et al.
patent: 5192610 (1993-03-01), Lorimer et al.
patent: 5364496 (1994-11-01), Bollinger et al.
patent: 5403657 (1995-04-01), Textor et al.
W. Hufnagel, Aluminium-Taschenbuch, Aluminium-Zentrale, Dusseldorf, pp. 711-714 and Table 14.2 (1984).
C. Lea, C. Molinari, "Magnesium diffusion, surface segregation and oxidation in A1-Mg alloys" Journal Of Materials Science, vol. 19, pp. 2336-2352 (1984).
Bercaw Craig A.
Byrne Joshua E.
Murugesh Laxman
Applied Materials Inc.
Chen Vivian
Church Shirley L.
Thibodeau Paul J.
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