Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1981-10-28
1982-09-28
Massie, Jerome W.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
134 2, 156646, 156665, 204192E, H01L 21306
Patent
active
043516963
ABSTRACT:
Bromine-containing plasma is utilized to inhibit corrosion of aluminum or aluminum alloy films which have been etched utilizing a chlorinated plasma.
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Chiu et al, "Plazma . . . Alloys" IBM Technical Discl. Bull., vol. 21, No. 6, (11/78) p. 2315.
Lee et al, "Reactive . . . Process" IBM Technical Discl. Bull., vol. 22, No. 8A, (1/80) p. 3347.
Crimi et al, "Etching . . . Alloys" IBM Technical Discl. Bull., vol. 22, No. 8A, (1/80) p. 3196.
Fairchild Camera & Instrument Corp.
Massie Jerome W.
Olsen Kenneth
Park Theodore Scott
Pollock Michael J.
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