Abrasive tool making process – material – or composition – Impregnating or coating an abrasive tool
Patent
1990-06-25
1992-09-01
Rachuba, M.
Abrasive tool making process, material, or composition
Impregnating or coating an abrasive tool
51317, 427142, B24B 100
Patent
active
051428288
ABSTRACT:
A defective metallization layer is removed from the top of an electronic component such as an integrated circuit or a copper/polyimide substrate by polishing with a rotating pad and a slurry. Non-defective underlying metallization layers are preserved and a new metallization layer is fabricated to replace the defective layer.
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Microelectronics and Computer Technology Corporation
Rachuba M.
Sigmond David M.
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