Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1975-06-23
1976-08-03
Smith, Alfred E.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
G01N 2320
Patent
active
039731251
ABSTRACT:
In a charged particle-beam apparatus, a lens device includes a charged particle-beam lens defining a beam axis and having two centrally apertured lens members formed of magnetic material and axially spaced from each other to form a space therebetween, the apertures of the lens members defining a lens bore, specimen holder means extending axially into the lens bore for holding a specimen therein, a first cooling body situated in the space between the lens members in heat insulating relation to the lens members and extending about the axis in a plane substantially perpendicular to the latter, the first cooling body consisting of non-magnetic material and having a central opening at least substantially equal in diameter to the lens bore so that the first cooling body is prevented from protruding into the lens bore, the central opening being defined by an inner wall of the first cooling body extending axially between the lens members and circumferentially facing the specimen holder means, heat-conductive connecting means for connecting the first cooling body to a cryogenic source, whereby the surface of the first cooling body, when cooled, reduces soiling of the specimen, a second cooling body disposed above the lens, the specimen holder means having a face directed away from the lens, the second cooling body being located adjacent the face of the specimen holder means and being formed with a central opening surrounding the beam axis and having a diameter larger than the specimen holder means and at least as large as the diameter of the lens bore whereby the second cooling body is prevented from protruding into the lens bore, and a second heat-conductive connecting means attached to the second cooling body for communicating with the cryogenic source.
REFERENCES:
patent: 2858444 (1958-10-01), Leisegang
patent: 3124680 (1964-03-01), Van Dorsten et al.
patent: 3373277 (1968-03-01), Heide
patent: 3387132 (1968-06-01), Herrmann et al.
Grigsby T. N.
Lerner Herbert L.
Siemens Aktiengesellschaft
Smith Alfred E.
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