Copper (II) complexes for deposition of copper films by...

Details Copper (II) complexes for deposition of copper films by... Copper (II) complexes for deposition of copper films by...

2005-07-29

2009-11-17

Meeks, Timothy H (Department: 1792)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C556S033000, C564S509000, C427S255600, C428S704000

Reexamination Certificate

active

07619107

ABSTRACT:
The present invention relates to novel 1,3-diimines and 1,3-diimine copper complexes and the use of 1,3-diimine copper complexes for the deposition of copper on substrates or in or on porous solids in an atomic layer deposition process.

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