Copper etching solution and method

Details Copper etching solution and method Copper etching solution and method

1989-12-15

1990-08-28

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 1566591, 156901, 252 791, 252 794, C23F 100, B44C 122, C09K 1300, C03C 1500

Patent

active

049522752

ABSTRACT:
A process and solution for selectively etching copper. The etching is effected by a nonaqueous solution of dimethyl sulfoxide and a halocarbon compound.

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