Copolymers

Details Copolymers Copolymers

1995-05-04

1997-04-01

Schofer, Joseph L.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

5263285, 5263297, C08F22206, C08F22010

Patent

active

056166672

ABSTRACT:
New mixed polymers which can serve as base polymers for high-resolution resists are structured from 40 to 99 mole % of a tert. butyl ester of an unsaturated carboxylic acid and 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid.

REFERENCES:
patent: 3184440 (1965-05-01), Chadha et al.
patent: 3677991 (1972-07-01), Moore
patent: 4491628 (1985-01-01), Ito et al.
patent: 4868259 (1989-09-01), Burroway et al.
Abstract of DE 1495 850.
"Macromolecules", vol. 21 (1988) pp. 1475 to 1482.

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