Copolymer, photoresist composition, and process for forming...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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Details

C430S286100, C430S905000, C430S910000, C528S025000, C528S032000, C526S271000, C526S279000

Reexamination Certificate

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06884566

ABSTRACT:
A novel copolymer includes a repeating unit (B) derived from an unsaturated carboxylic anhydride, a repeating unit (C) represented by Formula (II), and a repeating unit (D) represented by Formula (III).

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German Office Action issued in German Application 101 34 163.6-44 dated Sep. 15, 2004.

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