Electricity: electrical systems and devices – Safety and protection of systems and devices – Feeder protection in distribution networks
Patent
1996-08-01
1998-07-21
Leja, Ronald W.
Electricity: electrical systems and devices
Safety and protection of systems and devices
Feeder protection in distribution networks
361 62, H02H 300
Patent
active
057842388
ABSTRACT:
A coordinated cluster-tool energy distribution system provides a systems level approach to supplying all process energy needs for such industrial applications as those found in the semiconductor manufacturing industry, e.g. a single-wafer or multiple chamber processing chamber. The system is preferably provided as an integrated whole, rather than as a piece-meal collection of various energy distribution elements. The system comprises a shared DC bus that provides load diversity at lower energy levels, eliminates power supply components and/or minimizes the operating capacity of such components, and provides a lower installed cost; a common rectifier/filter or switcher power supply front end that lowers overall system cost, eliminates redundant power supply components, and provides a smaller system form factor; and (optionally) an energy storage device, such as a battery, capacitor, or flywheel, that reduces peak demand, thereby allowing smaller feeder circuits and a smaller energy source, and further providing ride through protection against brown-outs.
REFERENCES:
patent: 3359426 (1967-12-01), Burr
patent: 4031406 (1977-06-01), Leyde et al.
patent: 5073848 (1991-12-01), Steigerwald et al.
patent: 5297015 (1994-03-01), Miyazaki et al.
Fleming Dan R.
Nering Eric A.
Applied Materials Inc.
Glenn Michael A.
Leja Ronald W.
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