Coordinate measuring stage

Details Coordinate measuring stage Coordinate measuring stage

2005-07-19

2005-07-19

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Rotary

C476S064000, C476S066000, C074S112000

Reexamination Certificate

active

06919658

ABSTRACT:
An XY coordinate measuring stage includes a drive unit for a coordinate axis. The drive unit has a friction rod and a motor, the motor including a motor shaft in contact with a side of the friction rod. An applied pressure roller contacts an opposite side of the friction rod. At least one applied pressure spring urges the applied pressure roller, the friction rod, and the motor shaft against one another with an applied pressure force so that the motor shaft frictionally engages the friction rod, converting a rotational motion of the motor into a linear motion of the friction rod. A compensation device associated with the motor shaft generates a compensation force onto the motor shaft oppositely to the applied pressure force so as to at least partially compensate for the applied pressure force.

REFERENCES:
patent: 4444069 (1984-04-01), Dangschat
patent: 6178836 (2001-01-01), Miyake et al.
patent: 6840886 (2005-01-01), Ohara
patent: 2003/0053037 (2003-03-01), Blaesing-Bangert et al.
patent: 10140174 (2003-03-01), None
K.-D. Röth und K. Rinn, “Maskenmetrologie mit der LEICA LMS IPRO für die Halbleiter-Produktion”, Leica Mikroskopie und Systeme GmbH, Wetzlar (Translation—see Application Text).

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