Cooling system of a semiconductor testing device

Automatic temperature and humidity regulation – Ventilator type – Electrically actuated

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Details

622593, 165 803, 417 45, F24F 700, F28F 700

Patent

active

060894636

ABSTRACT:
There is provided a cooling system of a semiconductor testing device wherein the number of revolutions of a fan is controlled so as to obtain proper air-flow corresponding to a heating value for every operating mode of the measuring unit, thereby preventing power from being wasted. The cooling system of a semiconductor testing device comprises a fan for cooling the measuring unit by the rotation of a DC motor, a temperature sensor for measuring a temperature of the measuring unit which is cooled by the fan, and a temperature control/power supply unit for supervising temperature information which is supplied from the temperature sensor and executing optimum control of the number of revolutions of the fan corresponding to a heating value of the measuring unit for every operating mode. The temperature control/power supply unit executes optimum control of the number of revolutions of the fan by controlling a voltage of the DC motor to obtain air-flow needed for cooling the measuring unit corresponding to the heating value.

REFERENCES:
patent: 3058663 (1962-10-01), Barnard
patent: 4425766 (1984-01-01), Claypole
patent: 5718373 (1998-02-01), Kim et al.

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