Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1990-08-03
1991-11-12
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
250310, 250311, 250397, 358 93, 358229, 35821316, H01J 3718, H01J 3722
Patent
active
050650297
ABSTRACT:
An apparatus comprising a cooled slow-scan charge-coupled device camera mounted in a chamber attached to a projection or specimen chamber of an electron microscope, and a vacuum valve separating the camera chamber from the microscope chamber. The operation of the vacuum valve is linked to the microscope vacuum system such that the valve remains open while the microscope chamber is under vacuum, but closes if the microscope chamber is about to be let up to atmospheric pressure, and stays closed until the microscope chamber is evacuated again. In an alternate embodiment of the invention, the camera is inserted by a pneumatically operated piston to the microscope chamber, and is withdrawn and sealed off in a separate vacuum chamber in the microscope chamber is about to be let up to air.
REFERENCES:
patent: 4739399 (1988-04-01), Swann et al.
Strauss et al., Ultramicroscopy 22 (1987), pp. 117-124.
Zuo et al., Proceedings of the 46th Annual Meeting of the Electron Microscopy Society of America, 1988, pp. 656-657.
Mochel & Mochel, A CCD Imaging and Analysis System for the VG HB5 STEM, Proceedings 44th Annual EMSA Meeting, 1986, 616-617.
Berman Jack I.
Gatan Inc.
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