Conveyance method for transporting objects

Details Conveyance method for transporting objects Conveyance method for transporting objects

2006-10-18

2008-11-25

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S060000, C700S100000, C700S121000, C700S218000, C700S228000, C414S935000

Reexamination Certificate

active

07457680

ABSTRACT:
The present invention relates to conveyance method for transporting a plurality of unprocessed/processed objects between an automatic transporting device (AGV) and a semiconductor manufacturing device (prober). The prober has a load port to/from which the objects are delivered from/to the AGV. The method comprises the steps of: making a communication between the AGV and the prober to decide respective timings of deliveries of the objects to/from the load port; and transporting the objects between the AGV and the prober via the load port, with the timings of the deliveries of the objects to/from the load port shifted from each other by using a holding site for provisionally holding the object. The holding site is at least one of components of the AGV and the prober other than the load port.

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International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP01/11571.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338) issued for PCT/JP01/11571.

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