Controlling angle of incidence of multiple-beam optical...

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet

Reexamination Certificate

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C356S364000, C356S445000

Reexamination Certificate

active

08030632

ABSTRACT:
Provided is a method of controlling multiple beams directed to a structure in a workpiece, the method comprising generating a first illumination beam with a first light source and a second illumination beam with a second light source, projecting the first and second illumination beams onto a separate illumination secondary mirror, reflecting the first and second illumination beams onto an illumination primary mirror, the reflected first and second illumination beams projected onto the structure at a first and second angle of incidence respectively, the reflected first and second illumination beams generating a first and second detection beams respectively. The separate illumination secondary mirror is positioned relative to the illumination primary mirror so as make the first angle of incidence substantially the same or close to a calculated optimum first angle of incidence and make the second angle of incidence substantially the same or close to a calculated optimum second angle of incidence. The first and second detection beams are diffracted off the structure at the corresponding angle of incidence to a detection primary mirror, reflected onto a separate secondary detection mirror and other optical components on the detection path, and onto spectroscopic detectors.

REFERENCES:
patent: 4705940 (1987-11-01), Kohno
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5412473 (1995-05-01), Rosencwaig et al.
patent: 5486701 (1996-01-01), Norton et al.
patent: 5596406 (1997-01-01), Rosencwaig et al.
patent: 5747813 (1998-05-01), Norton et al.
patent: 5798837 (1998-08-01), Aspnes et al.
patent: 6184984 (2001-02-01), Lee et al.
patent: 6256097 (2001-07-01), Wagner
patent: 6297880 (2001-10-01), Rosencwaig et al.
patent: 6429943 (2002-08-01), Opsal et al.
patent: 6778273 (2004-08-01), Norton et al.
patent: 6785638 (2004-08-01), Niu et al.
patent: 6798512 (2004-09-01), Ebert et al.
patent: 6891626 (2005-05-01), Niu et al.
patent: 6943900 (2005-09-01), Niu et al.
patent: 6972419 (2005-12-01), Tejnil
patent: 7006221 (2006-02-01), Wolf et al.
patent: 7081957 (2006-07-01), Norton
patent: 7280229 (2007-10-01), Li et al.
patent: 7331676 (2008-02-01), Ferber et al.
patent: 7502101 (2009-03-01), Raymond et al.
U.S. Appl. No. 12/050,053, filed Mar. 17, 2008 for Tian et al.
U.S. Appl. No. 12/050,919, filed Mar. 18, 2008 for Tian et al.
U.S. Appl. No. 12/057,316, filed Mar. 27, 2008 for Tian et al.
U.S. Appl. No. 12/057,332, filed Mar. 27, 2008 for Tian et al.
U.S. Appl. No. 12/057,346, filed Mar. 27, 2008 for Tian et al.
U.S. Appl. No. 12/059,610, filed Mar. 31, 2008 for Meng et al.
U.S. Appl. No. 12/141,754, filed Jun. 18, 2008 for Tian et al.
U.S. Appl. No. 12/141,867, filed Jun. 18, 2008 for Tian et al.
U.S. Appl. No. 12/141,892, filed Jun. 18, 2008 for Tian et al.
U.S. Appl. No. 12/413,945, filed Mar. 30, 2009 for Norton et al.
U.S. Appl. No. 12/414,462, filed Mar. 30,2009 for Li et al.

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