4. Coating apparatus
  5. Gas or vapor deposition

Tokyo Electron Limted

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Controlling angle of incidence of multiple-beam optical...

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
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Metal organic chemical vapor deposition method and apparatus

Coating apparatus – Gas or vapor deposition
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Probing method and probing apparatus in which steady load is...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
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