Controlled environment enclosure and mechanical interface

Details Controlled environment enclosure and mechanical interface Controlled environment enclosure and mechanical interface

1993-04-01

1995-01-03

Huppert, Michael S.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414217, B65G 4900, B65G 6500

Patent

active

053781074

ABSTRACT:
Disclosed is a method for enabling the contents of a first chamber to be moved into a second chamber without exposing either chamber to elements making particulate-producing sliding contact. In one aspect of the invention, the method includes providing a carrier for a vertically spaced array of articles such as semiconductor wafers and having a clamping device for clampingly holding each of the articles; locating the carrier within the second chamber; opening the carrier by moving a first portion of the carrier upwardly from a second portion or,he carrier without producing sliding contact within the second chamber; and releasing the a clamping device without producing sliding contact within the second chamber, whereby the articles are accessible within the second chamber.

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patent: 5112277 (1992-05-01), Cruz et al.
patent: 5139459 (1992-08-01), Takahashi et al.

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