Controlled environment enclosure and mechanical interface

Details Controlled environment enclosure and mechanical interface Controlled environment enclosure and mechanical interface

1994-09-26

2000-07-04

Keenan, James W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414411, 414939, B65G 4907

Patent

active

060829486

ABSTRACT:
A system for vacuum-processing objects such as electronic integrated circuit wafers comprises (a) a carrier for transporting the wafers under vacuum in a cassette, the cassette being supported on a movable wall that serves as a bottom cover member of the carrier; and (b) a processing machine having a transfer chamber that is also maintained under vacuum, the transfer chamber having a movable wall in the form of an elevatable stage that sealingly closes the transfer chamber in its outermost position. There is a small sealingly closed interface chamber extending between the movable walls when the cassette is mounted onto the machine. A vacuum pump evacuates the interface chamber in preparation for lowering of the cassette into the transfer chamber by an elevator mechanism.

REFERENCES:
patent: 4260312 (1981-04-01), Hackney
patent: 4382739 (1983-05-01), Mack et al.
patent: 4503807 (1985-03-01), Nakayama et al.
patent: 4544317 (1985-10-01), Carter
patent: 4582219 (1986-04-01), Mortensen et al.
patent: 4632624 (1986-12-01), Mirkovich et al.
patent: 4680474 (1987-07-01), Turner et al.
patent: 4709834 (1987-12-01), Mortensen et al.
patent: 4746256 (1988-05-01), Boyle et al.
patent: 4826360 (1989-05-01), Iwasawa et al.
patent: 4915564 (1990-04-01), Eror et al.
patent: 4923584 (1990-05-01), Bramhall, Jr. et al.
patent: 4962726 (1990-10-01), Matsushita et al.
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5044871 (1991-09-01), Davis et al.
patent: 5056875 (1991-10-01), Akins
patent: 5112277 (1992-05-01), Cruz et al.
patent: 5139459 (1992-08-01), Takahashi et al.
patent: 5169272 (1992-12-01), Bonora et al.

Affiliated with

Also associated with

Rating

Controlled environment enclosure and mechanical interface does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Controlled environment enclosure and mechanical interface, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Controlled environment enclosure and mechanical interface will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1480435