Control system for semiconductor processing apparatus

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C700S009000, C700S051000, C700S103000, C700S121000, C702S182000

Reexamination Certificate

active

11199219

ABSTRACT:
A control system for a semiconductor processing apparatus comprises a control server connected to a semiconductor processing apparatus, a verification server connected to the control server, and a database connected to the verification server. The verification server evaluates input parameter values stored in the semiconductor processing apparatus against verification data stored in the database. The results of the evaluation are used to determine whether a process will be performed by the semiconductor processing apparatus.

REFERENCES:
patent: 4901242 (1990-02-01), Kotan
patent: 6415193 (2002-07-01), Betawar et al.
patent: 2003-324043 (2003-11-01), None
patent: 1998-076614 (1998-11-01), None
patent: 2000-0028114 (2000-05-01), None

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