Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-05-29
2007-05-29
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S009000, C700S051000, C700S103000, C700S121000, C702S182000
Reexamination Certificate
active
11199219
ABSTRACT:
A control system for a semiconductor processing apparatus comprises a control server connected to a semiconductor processing apparatus, a verification server connected to the control server, and a database connected to the verification server. The verification server evaluates input parameter values stored in the semiconductor processing apparatus against verification data stored in the database. The results of the evaluation are used to determine whether a process will be performed by the semiconductor processing apparatus.
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patent: 2000-0028114 (2000-05-01), None
Chung Jae-Woo
Jeon Tae-Ha
Jung Hyo-Sang
Kim Myung-Kill
Sim Kyung-Bo
Picard Leo
Samsung Electronics Co,. Ltd.
Shechtman Sean
Volentine & Whitt PLLC
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