Coherent light generators – Particular active media – Gas
Reissue Patent
2011-08-02
2011-08-02
Nguyen, Dung T (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S055000, C372S057000, C372S025000
Reissue Patent
active
RE042588
ABSTRACT:
The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Feedback timing control techniques are provided for controlling the relative timing of the discharges in the two chambers with an accuracy in the range of about 2 to 5 billionths of a second even in burst mode operation. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality.
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Ershov Alexander I.
Fallon John P.
Ishihara Toshihiko
Jacques Robert N.
Meisner John
Cymer Inc.
Nguyen Dung T
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