Control system and method of semiconductor inspection system

Details Control system and method of semiconductor inspection system Control system and method of semiconductor inspection system

2007-03-27

2007-03-27

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB

Reexamination Certificate

active

11062827

ABSTRACT:
A control system and method of a semiconductor inspection system are disclosed, wherein the inspection can be conducted without reducing the reliability of measurement even in the case where the supply voltage drops. The control system has a controller, a power supply for a power on-off circuit constituting a switching regulator designed to maintain the output voltage against a supply voltage drop, and a supply voltage drop detector. In the case where a supply voltage drop is detected during the measurement, the measurement is automatically suspended, and after restoring the supply voltage, the measurement is automatically restarted.

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“Transistor Technique SPECIAL No. 28”; pp. 87-100; © 1991; CQ Publishing Co., Ltd.

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