Control of strain in device layers by selective relaxation

Details Control of strain in device layers by selective relaxation Control of strain in device layers by selective relaxation

2007-12-11

2007-12-11

Smith, Matthew (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Thin active physical layer which is

Heterojunction

C257S019000, C257S020000, C257SE29193

Reexamination Certificate

active

11227472

ABSTRACT:
The benefits of strained semiconductors are combined with silicon-on-insulator approaches to substrate and device fabrication. Strain in the strained semiconductors is controlled for improved device performance.

REFERENCES:
patent: 4010045 (1977-03-01), Ruehrwein
patent: 4704302 (1987-11-01), Bruel et al.
patent: 4710788 (1987-12-01), Dambkes et al.
patent: 4969031 (1990-11-01), Kobayashi et al.
patent: 4987462 (1991-01-01), Kim et al.
patent: 4990979 (1991-02-01), Otto
patent: 4997776 (1991-03-01), Harame et al.
patent: 5013681 (1991-05-01), Godbey et al.
patent: 5089872 (1992-02-01), Ozturk et al.
patent: 5091767 (1992-02-01), Bean et al.
patent: 5155571 (1992-10-01), Wang et al.
patent: 5166084 (1992-11-01), Pfiester
patent: 5177583 (1993-01-01), Endo et al.
patent: 5202284 (1993-04-01), Kamins et al.
patent: 5207864 (1993-05-01), Bhat et al.
patent: 5208182 (1993-05-01), Narayan et al.
patent: 5212110 (1993-05-01), Pfiester et al.
patent: 5221413 (1993-06-01), Brasen et al.
patent: 5240876 (1993-08-01), Gaul et al.
patent: 5241197 (1993-08-01), Murakami et al.
patent: 5242847 (1993-09-01), Ozturk et al.
patent: 5250445 (1993-10-01), Bean et al.
patent: 5285086 (1994-02-01), Fitzgerald, Jr.
patent: 5291439 (1994-03-01), Kauffmann et al.
patent: 5298452 (1994-03-01), Meyerson
patent: 5310451 (1994-05-01), Tejwani et al.
patent: 5316958 (1994-05-01), Meyerson
patent: 5346848 (1994-09-01), Grupen-Shemansky et al.
patent: 5374564 (1994-12-01), Bruel
patent: 5399522 (1995-03-01), Ohori
patent: 5413679 (1995-05-01), Godbey
patent: 5424243 (1995-06-01), Takasaki
patent: 5426069 (1995-06-01), Selvakumar et al.
patent: 5426316 (1995-06-01), Mohammad
patent: 5439843 (1995-08-01), Sakaguchi et al.
patent: 5442205 (1995-08-01), Brasen et al.
patent: 5461243 (1995-10-01), Ek et al.
patent: 5461250 (1995-10-01), Burghartz et al.
patent: 5462883 (1995-10-01), Dennard et al.
patent: 5476813 (1995-12-01), Naruse
patent: 5479033 (1995-12-01), Baca et al.
patent: 5484664 (1996-01-01), Kitahara et al.
patent: 5523243 (1996-06-01), Mohammad
patent: 5523592 (1996-06-01), Nakagawa et al.
patent: 5534713 (1996-07-01), Ismail et al.
patent: 5536361 (1996-07-01), Kondo et al.
patent: 5540785 (1996-07-01), Dennard et al.
patent: 5548128 (1996-08-01), Soref et al.
patent: 5572043 (1996-11-01), Shimizu et al.
patent: 5596527 (1997-01-01), Tomioka et al.
patent: 5607876 (1997-03-01), Biegelsen et al.
patent: 5617351 (1997-04-01), Bertin et al.
patent: 5630905 (1997-05-01), Lynch et al.
patent: 5659187 (1997-08-01), Legoues et al.
patent: 5683934 (1997-11-01), Candelaria
patent: 5698869 (1997-12-01), Yoshimi et al.
patent: 5714777 (1998-02-01), Ismail et al.
patent: 5728623 (1998-03-01), Mori
patent: 5739567 (1998-04-01), Wong
patent: 5759898 (1998-06-01), Ek et al.
patent: 5777347 (1998-07-01), Bartelink
patent: 5786612 (1998-07-01), Otani et al.
patent: 5786614 (1998-07-01), Chuang et al.
patent: 5792679 (1998-08-01), Nakato
patent: 5808344 (1998-09-01), Ismail et al.
patent: 5847419 (1998-12-01), Imai et al.
patent: 5863830 (1999-01-01), Bruel et al.
patent: 5877070 (1999-03-01), Goesele et al.
patent: 5882987 (1999-03-01), Srikrishnan
patent: 5891769 (1999-04-01), Liaw et al.
patent: 5906708 (1999-05-01), Robinson et al.
patent: 5906951 (1999-05-01), Chu et al.
patent: 5912479 (1999-06-01), Mori et al.
patent: 5923046 (1999-07-01), Tezuka et al.
patent: 5943560 (1999-08-01), Chang et al.
patent: 5963817 (1999-10-01), Chu et al.
patent: 5966622 (1999-10-01), Levine et al.
patent: 5993677 (1999-11-01), Biasse et al.
patent: 5998807 (1999-12-01), Lustig et al.
patent: 6013134 (2000-01-01), Chu et al.
patent: 6013563 (2000-01-01), Henley et al.
patent: 6020252 (2000-02-01), Aspar et al.
patent: 6033974 (2000-03-01), Henley et al.
patent: 6033995 (2000-03-01), Muller
patent: 6058044 (2000-05-01), Sugiura et al.
patent: 6059895 (2000-05-01), Chu et al.
patent: 6074919 (2000-06-01), Gardner et al.
patent: 6096590 (2000-08-01), Chan et al.
patent: 6103559 (2000-08-01), Gardner et al.
patent: 6103597 (2000-08-01), Aspar et al.
patent: 6103599 (2000-08-01), Henley et al.
patent: 6107653 (2000-08-01), Fitzgerald
patent: 6111267 (2000-08-01), Fischer et al.
patent: 6117750 (2000-09-01), Bensahel et al.
patent: 6130453 (2000-10-01), Mei et al.
patent: 6133799 (2000-10-01), Favors, Jr. et al.
patent: 6140687 (2000-10-01), Shimomura et al.
patent: 6143636 (2000-11-01), Forbes et al.
patent: 6153495 (2000-11-01), Kub et al.
patent: 6154475 (2000-11-01), Soref et al.
patent: 6160303 (2000-12-01), Fattaruso
patent: 6162688 (2000-12-01), Gardner et al.
patent: 6162705 (2000-12-01), Henley et al.
patent: 6184111 (2001-02-01), Henley et al.
patent: 6190998 (2001-02-01), Bruel et al.
patent: 6191007 (2001-02-01), Matsui et al.
patent: 6191432 (2001-02-01), Sugiyama et al.
patent: 6194722 (2001-02-01), Fiorini et al.
patent: 6204529 (2001-03-01), Lung et al.
patent: 6207977 (2001-03-01), Augusto
patent: 6210988 (2001-04-01), Howe et al.
patent: 6218677 (2001-04-01), Broekaert
patent: 6225192 (2001-05-01), Aspar et al.
patent: 6228694 (2001-05-01), Doyle et al.
patent: 6232138 (2001-05-01), Fitzgerald et al.
patent: 6235567 (2001-05-01), Huang
patent: 6235568 (2001-05-01), Murthy et al.
patent: 6242324 (2001-06-01), Kub et al.
patent: 6249022 (2001-06-01), Lin et al.
patent: 6251751 (2001-06-01), Chu et al.
patent: 6251755 (2001-06-01), Furukawa et al.
patent: 6261929 (2001-07-01), Gehrke et al.
patent: 6266278 (2001-07-01), Harari et al.
patent: 6271551 (2001-08-01), Schmitz et al.
patent: 6271726 (2001-08-01), Fransis et al.
patent: 6281532 (2001-08-01), Doyle et al.
patent: 6290804 (2001-09-01), Henley et al.
patent: 6291321 (2001-09-01), Fitzgerald
patent: 6303468 (2001-10-01), Aspar et al.
patent: 6313016 (2001-11-01), Kibbel et al.
patent: 6316301 (2001-11-01), Kant
patent: 6323108 (2001-11-01), Kub et al.
patent: 6326664 (2001-12-01), Chau et al.
patent: 6326667 (2001-12-01), Sugiyama et al.
patent: 6329063 (2001-12-01), Lo et al.
patent: 6335546 (2002-01-01), Tsuda et al.
patent: 6339232 (2002-01-01), Takagi
patent: 6344417 (2002-02-01), Usenko
patent: 6346459 (2002-02-01), Usenko et al.
patent: 6350993 (2002-02-01), Chu et al.
patent: 6352909 (2002-03-01), Usenko
patent: 6355493 (2002-03-01), Usenko
patent: 6368733 (2002-04-01), Nishinaga et al.
patent: 6368938 (2002-04-01), Usenko
patent: 6369438 (2002-04-01), Sugiyama et al.
patent: 6372356 (2002-04-01), Thornton et al.
patent: 6372593 (2002-04-01), Hattori et al.
patent: 6372609 (2002-04-01), Aga et al.
patent: 6387829 (2002-05-01), Usenko et al.
patent: 6391740 (2002-05-01), Cheung et al.
patent: 6399970 (2002-06-01), Kubo et al.
patent: 6403975 (2002-06-01), Brunner et al.
patent: 6407406 (2002-06-01), Tezuka
patent: 6410371 (2002-06-01), Yu et al.
patent: 6425951 (2002-07-01), Chu et al.
patent: 6429061 (2002-08-01), Rim
patent: 6445016 (2002-09-01), An et al.
patent: 6448152 (2002-09-01), Henley et al.
patent: 6455397 (2002-09-01), Belford
patent: 6458672 (2002-10-01), Henley et al.
patent: 6475072 (2002-11-01), Canaperi et al.
patent: 6489639 (2002-12-01), Hoke et al.
patent: 6514836 (2003-02-01), Belford
patent: 6515335 (2003-02-01), Christiansen et al.
patent: 6521041 (2003-02-01), Wu et al.
patent: 6524935 (2003-02-01), Canaperi et al.
patent: 6534381 (2003-03-01), Cheung et al.
patent: 6555839 (2003-04-01), Fitzgerald
patent: 6563152 (2003-05-01), Roberds et al.
patent: 6573126 (2003-06-01), Cheng et al.
patent: 6583015 (2003-06-01), Fitzgerald et al.
patent: 6583437 (2003-06-01), Mizuno et al.
patent: 6591321 (2003-07-01), Arimilli et al.
patent: 6593191 (2003-07-01), Fitzgerald
patent: 6593625 (2003-07-01), Christiansen et al.
patent: 6596610 (2003-07-01), Kuwabara et al.
patent: 6597016 (2003-07-01), Yuki et al.
patent: 6602613 (2003-08-01), Fitzgerald
patent: 6603156 (2003-08-01), Rim
patent: 6605498 (2003-08-01), Murthy et al.
patent: 6607948 (2003-08-01), Sugiyama et al.
patent: 6621131 (2003-09-01), Murthy et al.
patent: 6624047 (2003-09-01), Sakaguchi et al.
patent: 6624478 (2003-09-01), Anderson et al.
patent: 6632724 (2003-10-01), Henley et a

Affiliated with

Also associated with

Rating

Control of strain in device layers by selective relaxation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Control of strain in device layers by selective relaxation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Control of strain in device layers by selective relaxation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3884545