Abrading – Abrading process – Glass or stone abrading
Patent
1997-06-25
1999-06-29
Eley, Timothy V.
Abrading
Abrading process
Glass or stone abrading
451296, 451303, 451287, B35B 100, B35B 719
Patent
active
059160128
ABSTRACT:
A technique for controlling a polishing rate across a substrate surface when performing CMP, in order to obtain uniform polishing of the substrate surface. A support housing which underlies a polishing pad includes a plurality of openings for dispensing a pressurized fluid. The openings are arranged into a pre-configured pattern for dispensing the fluid to the underside of the pad opposite the substrate surface being polished. The openings are configured into a number of groupings, in which a separate channel is used for each grouping so that fluid pressure for each group of openings can be separately and independently controlled.
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Breivogel Joseph R.
Pant Anil K.
Rivera Robert M.
Young Douglas W.
Banks Derris Holt
Eley Timothy V.
Lam Research Corporation
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