Control of beam spot size in ellipsometer and the like systems

Details Control of beam spot size in ellipsometer and the like systems Control of beam spot size in ellipsometer and the like systems

2008-03-18

2008-03-18

Punnoose, Roy M (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

11204835

ABSTRACT:
Disclosed are system for and method of analyzing substantially the exact same spot size on a sample system with at least two wavelengths for which the focal lengths do not vary more than within an acceptable amount.

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