Control of beam spot size in ellipsometer and the like systems

Details Control of beam spot size in ellipsometer and the like systems Control of beam spot size in ellipsometer and the like systems

2007-05-08

2007-05-08

Nguyen, Tu T. (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

10963402

ABSTRACT:
System and methodology for controlling a beam spot size where it impinges onto a sample, and/or discriminant selection and analysis of data from detector elements in a two dimensional detector array which correspond to identified regions on a sample.

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