Control by sample reflectivity

Details Control by sample reflectivity Control by sample reflectivity

2011-03-08

2011-03-08

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Of light reflection

C356S448000

Reexamination Certificate

active

07903250

ABSTRACT:
A method of performing an investigation of a substrate, by measuring a reflectivity of the substrate, comparing the reflectivity of the substrate to an anticipated reflectivity value, selectively subjecting the substrate to a laser beam for a predetermined duration and at a predetermined energy only when the reflectivity of the substrate is within a specified tolerance of the anticipated reflectivity value, selectively signaling a fault condition when the reflectivity of the substrate is not within the specified tolerance of the anticipated reflectivity value, and selectively performing the investigation of the substrate only when the reflectivity of the substrate is within the specified tolerance of the anticipated reflectivity value.

REFERENCES:
patent: 4377340 (1983-03-01), Green et al.
patent: 6507393 (2003-01-01), Batchelder
patent: 6693293 (2004-02-01), Oomori et al.
patent: 6895360 (2005-05-01), Liu et al.
patent: 7372557 (2008-05-01), Oomori et al.
patent: 7659976 (2010-02-01), Kaller et al.

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