Contrast based resolution enhancing technology

Details Contrast based resolution enhancing technology Contrast based resolution enhancing technology

2006-03-14

2006-03-14

Garbowski, Leigh M. (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000

Reexamination Certificate

active

07013439

ABSTRACT:
A contrast-base resolution enhancing technology (RET) receives an indication of an edge fragment in a photolithographic design. The edge fragment has a tag classification that defines a contrast of the edge fragment. The contrast-based RET applies a resolution enhancement to the edge fragment based on the tag classification. The resolution enhancement introduces an additional feature in the photolithographic design. The additional feature changes the contrast of the edge fragment.

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