Fluid handling – Processes
Patent
1994-04-29
1998-03-03
Lee, Kevin
Fluid handling
Processes
137256, 137263, B67D 500
Patent
active
057224471
ABSTRACT:
A fluid delivery system (10, 210) is disclosed that includes a pipeline network (20, 220) having a chemical supply line (12, 14, 212), a filtering system (134, 235), a feeding portion (24, 224), and a return portion (26, 226). A first tank (28, 228), a second tank (30, 230), and a third tank (32, 232) are coupled to the feeding portion (24, 224) and the return portion (26, 226) of the pipe network (20, 220). A control module (100) is coupled to a multiplicity of valves (46, 52, 48, 54, 50, 56, 70, 86, 72, 88, 74, 90) for controlling the flow of the fluid through the system in a manner that provides a continuous and bumpless flow of the fluid. Additionally, the system (10, 210) may include a plurality of sensors (94, 96, 98) that allow control module 100 to sense the volume of fluid in the system (10, 210) and each tank (28, 30, 32, 228, 230, 232). Fluid flow through the pipe network (20, 220) is promoted by a pressure differential between a pressure source (58, 264, 266, 268) and a vent line or second pressure source (78, 278). A method of circulating the fluid with system (10, 210) is also provided.
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Morgan Vernon E.
Reedy Carl D.
Braden Stanton C.
Brady III Wade James
Donaldson Richard L.
Lee Kevin
Texas Instruments Incorporated
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