Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1992-02-03
1993-09-07
Kunemund, Robert
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156600, 1566171, 1566181, 1566203, 156DIG83, 156DIG115, 422248, 422249, 422253, C30B 2906
Patent
active
052425312
ABSTRACT:
In the Czochralski crucible pulling of crystal ingots, in particular those of silicon and having particularly large crystal diameters, the degree of filling of the crucible is kept approximately constant during the pulling process by continuously adding solid or liquid recharging material. According to the invention, the known disadvantages of thermal disturbances and the introduction of impurities and particles are overcome by a recharging system with a gas-tight seal, comprising additional crucible, stock container for semiconductor material and dopant having the appropriate feedlines and an exhaust gas line. In addition, the process makes possible a regulatable and separate recharging of dopant via the additional crucible.
REFERENCES:
patent: 4036595 (1977-07-01), Lorenzini et al.
patent: 4379021 (1983-04-01), Damen et al.
patent: 4410494 (1983-10-01), Fiegl
patent: 4547258 (1985-10-01), Witter et al.
patent: 4659421 (1987-04-01), Jewett
patent: 5037503 (1991-08-01), Kajimoto et al.
Fiegl, "Recent Advances and Future Directions in CZ-Silicon Crystal Growth echnology," Solid State Technology, Aug. 1983, pp. 121-131.
Zulehner and Huber, "Czochralski-Grown Silicon," Crystals 8, Springer Verlag, Berlin-Heidelberg, 1982.
Klingshirn Herbert
Lang Reinhard
Garrett Felisa
Kunemund Robert
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe m.b.H
LandOfFree
Continuous liquid silicon recharging process in Czochralski cruc does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Continuous liquid silicon recharging process in Czochralski cruc, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Continuous liquid silicon recharging process in Czochralski cruc will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-484731