Continuous cleaning megasonic tank with reduced duty cycle trans

Details Continuous cleaning megasonic tank with reduced duty cycle trans Continuous cleaning megasonic tank with reduced duty cycle trans

1998-11-11

2000-11-21

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With movable means to cause fluid motion

134186, 134902, B08B 312

Patent

active

06148833&

ABSTRACT:
A sonic tank for cleaning substrates is provided. The tank has two or more upwardly angled walls. Arrays of one or more transducers are positioned along at least two of the two or more angled walls. The transducer arrays are alternately energized maintaining nearly 100% substrate surface cleaning at any given time, and 50% duty cycle (or less) for each transducer array. The substrate supports are positioned such that nearly every point along the substrate's surface is contacted by energy from at least one transducer, and transducer opposing walls are positioned to avoid interfering reflections therefrom.

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