Chemistry: electrical and wave energy – Apparatus – Vacuum arc discharge coating
Reexamination Certificate
2011-01-18
2011-01-18
Nguyen, Nam X (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Vacuum arc discharge coating
C204S298040, C204S298120, C204S298230, C204S298260
Reexamination Certificate
active
07871506
ABSTRACT:
An arc deposition apparatus comprises an evacuatable chamber and means for positioning at least two targets in the chamber, wherein a first one of the at least two targets is positionable in an operative position and another of the at least two targets is positionable in a standby position. An electrical power supply is provided for supplying electrical power to the target held in the operative position to form an arc on an emission surface of the operative target. Means are provided for preparing an emission surface of the target positioned in the standby position to have a predetermined morphology. Alternatively, or in conjunction with the surface preparing means, means are provided for inspecting whether the emission surface of the target positioned in the standby position has a predetermined morphology. Preferably, the positioning means is configured to interchange the at least two targets at a predetermined time.
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Cheah Li Kang
Shi Xu
Berman Jason M
Bozicevic Field & Francis LLP
Field Bret E.
Nanofilm Technologies International Pte Ltd
Nguyen Nam X
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