4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Xu Shi

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Arc monitoring

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Reexamination Certificate

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Cathode arc source for metallic and dielectric coatings

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Reexamination Certificate

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Cathode arc source with magnetic field generating means...

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Reexamination Certificate

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Cathode arc source with target feeding apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Composite coatings

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-905526

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