Contamination distribution apparatus and method

Details Contamination distribution apparatus and method Contamination distribution apparatus and method

2005-11-29

2005-11-29

Chaudhuri, Olik (Department: 2823)

Semiconductor device manufacturing: process

With measuring or testing

C438S758000

Reexamination Certificate

active

06969621

ABSTRACT:
Embodiments of the invention include an apparatus for uniformly contaminating samples. The apparatus includes a housing that contains a rotatable carousel for the holding samples. A drive element is used for rotating the carousel. The apparatus includes a contaminant dispenser for dispersing a contaminant onto the samples. The apparatus also includes a control element that can be used to control contaminant dose and carousel rotation rate and rotation time. A method for uniformly contaminating samples includes providing such a contamination chamber and placing a plurality of samples within the chamber. A contaminant is introduced into the chamber and the samples are spun so that the contaminant is uniformly distributed onto the spinning samples. After contamination the samples are removed from the chamber.

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