4. Measuring and testing
  5. Sampler, sample handling, etc.
  6. Capture device

Michael S. Gatov

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Cleanliness verification system

Measuring and testing – Sampler – sample handling – etc. – Capture device
Reexamination Certificate

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Contamination distribution apparatus and method

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Uniform airflow diffuser

Ventilation – Clean room
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2497736

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