Fluid sprinkling – spraying – and diffusing – With system fluid relief or return to supply – Return from liquid pump outlet to supply holder
Reexamination Certificate
2005-04-05
2005-04-05
Scherbel, David A. (Department: 3752)
Fluid sprinkling, spraying, and diffusing
With system fluid relief or return to supply
Return from liquid pump outlet to supply holder
C004S213000
Reexamination Certificate
active
06874700
ABSTRACT:
A contamination control apparatus has a sprayer including at least one nozzle for spraying water, at least one eliminator having a passageway in which air is sprayed with the water to remove potential contaminants from the air, and a circulator for providing the sprayer with the water. The circulator includes a pH control device for adjusting the pH of the water fed to the sprayer, and an organic matter removing device for removing organic matter from the water. The contamination control apparatus can be advantageously employed in an air-conditioning system of a substrate processing facility.
REFERENCES:
patent: 6643850 (2003-11-01), Chasen et al.
patent: 11-74168 (1999-03-01), None
patent: 11-74193 (1999-03-01), None
Cho Hyun-Ho
Ham Dong-Seok
Kim Hyun-Joon
Bui Thach H.
Samsung Electronics Co,. Ltd.
Scherbel David A.
Volentine Francos & Whitt P.L.L.C.
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