Contaminant resistant barriers to prevent outgassing

Details Contaminant resistant barriers to prevent outgassing Contaminant resistant barriers to prevent outgassing

1998-09-23

2000-05-23

Ngo, Ngan V.

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

257296, 257640, 257649, 257913, H01L 2358, H01L 27108, H01L 2976, H01L 2994, H01L 31119

Patent

active

060668938

ABSTRACT:
An integrated circuit comprises a dielectric layer disposed outwardly from a semiconductor substrate, the dielectric layer comprising at least one cavity having sidewalls extending from an outer surface of the dielectric layer inwardly toward the substrate. The integrated circuit further comprises a contaminant resistant barrier disposed outwardly from at least the sidewalls of the cavity in the dielectric layer.

REFERENCES:
patent: 4060827 (1977-11-01), Ono et al.
patent: 4658282 (1987-04-01), Matzen, Jr.
patent: 5449934 (1995-09-01), Shano et al.
patent: 5512785 (1996-04-01), Haver et al.
patent: 5866920 (1999-02-01), Matsumoto et al.

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