Container-shaped bottom electrode for integrated circuit capacit

Details Container-shaped bottom electrode for integrated circuit capacit Container-shaped bottom electrode for integrated circuit capacit

1995-12-19

1998-09-01

Tran, Minh-Loan

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257303, 257308, 257309, 257534, 361303, H01L 27108

Patent

active

058014136

ABSTRACT:
Disclosed is a bi-level container capacitor in which a bottom portion is smooth and an upper portion is rugged or rough. Once the container has been formed within a thick insulating layer, a conductive layer is conformally deposited over the container interior surfaces. The bottom portion of the container, which is narrowly confined between two gate electrodes, is isolated from further processing by filling the bottom portion with a protective film. A rugged conductive layer is then formed only on the surface of the upper portion of the container, after which the protective film is removed from the bottom portion. As a result, a capacitor bottom plate conforms to the interior surfaces of the container, the bottom plate including a rugged upper portion and a smooth bottom portion.

REFERENCES:
patent: 5037773 (1991-08-01), Lee et al.
patent: 5082797 (1992-01-01), Chan et al.
patent: 5102832 (1992-04-01), Tuttle
patent: 5112773 (1992-05-01), Tuttle
patent: 5126280 (1992-06-01), Chan et al.
patent: 5130885 (1992-07-01), Fazan et al.
patent: 5138411 (1992-08-01), Sandhu
patent: 5202278 (1993-04-01), Mathews et al.
patent: 5236860 (1993-08-01), Fazan et al.
patent: 5278091 (1994-01-01), Fazan et al.
patent: 5320880 (1994-06-01), Sandhu et al.
patent: 5418180 (1995-05-01), Brown
patent: 5623243 (1997-04-01), Watanabe et al.

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