Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Patent
1995-05-08
1998-12-08
Saadat, Mahshid D.
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified configuration
257900, 257382, 257377, H01L 2348, H01L 2352, H01L 2940, H01L 27088
Patent
active
058474650
ABSTRACT:
A method for fabrication of metal to semiconductor contacts results in sloped sidewalls in contact regions. An oxide layer is deposited and etched back to form sidewall spacers. A glass layer is then deposited and heated to reflow. After reflow, an etch back of the glass layer results is sloped sidewalls at contact openings and over steps.
REFERENCES:
patent: 3825442 (1974-07-01), Moore
patent: 4284659 (1981-08-01), Jaccodine
patent: 4443493 (1984-04-01), Delfino
patent: 4455325 (1984-06-01), Razouk
patent: 4489481 (1984-12-01), Jones
patent: 4641420 (1987-02-01), Lee
patent: 4755479 (1988-07-01), Miura
patent: 4786609 (1988-11-01), Chen
patent: 4795718 (1989-01-01), Beitman
patent: 4808548 (1989-02-01), Thomas et al.
patent: 4810666 (1989-03-01), Taji
patent: 4905064 (1990-02-01), Yabu et al.
patent: 5414302 (1995-05-01), Shin et al.
Sakamoto, M. et al., "A New Self . . . ," IEEE IEDM Tech. Digest, 1980, pp. 136-139.
Lau, C.K. et al., "A Super Self . . . ," IEEE IEDM Tech. Digest, 1987, pp. 358-361.
Anner, G., Planar Processing Primer, Van Nostrand Reinhold, 1990, pp. 148-178.
Wolf, S. et al., Silicon Processing for the VLSI Era, vol. 1, Lattice Press, 1986, pp. 187-191.
Wolf, S. et al., Silicon Processing, vol. 1, 1986, Lattice Press, pp. 370-373, 384-387.
Han Yu-Pin
Liou Fu-Tai
Clark Jhihan B.
Galanthay Theodore E.
Hill Kenneth C.
Jorgenson Lisa K.
Saadat Mahshid D.
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