Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1994-06-30
1995-08-15
Weider, Kenneth A.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324659, 324683, 324686, 324693, 324709, 324719, 324752, 324766, 324 96, G01N 2722, G01R 2700, G01R 3126, G01R 31308
Patent
active
054422973
ABSTRACT:
A contactless sheet resistance measurement apparatus and a method for measuring the sheet resistance of a desired layer of a first conductivity type, formed upon a substrate of an opposite conductivity type, is disclosed. The apparatus comprises a junction capacitance establishing means, a point location alternating current AC photovoltage generating means for generating a laterally propagated AC photovoltage, an attenuation and phase shift monitoring means for monitoring the .laterally propagated AC photovoltage, and a sheet resistance signal generating means responsive to the-junction capacitance establishing means, the AC photovoltage generating means, and the attenuation and phase shift monitoring means for generating an output signal indicative of a sheet resistance R.sub.S of the desired layer according to a prescribed sheet resistance model.
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Balconi-Lamica Michael J.
Brown Glenn W.
International Business Machines - Corporation
Murray Susan M.
Weider Kenneth A.
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