Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2006-08-08
2006-08-08
Wilkins, III, Harry D (Department: 1742)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S285000, C204S286100, C204S287000, C204S288300, C204S297010, C204S297060, C204S297140
Reexamination Certificate
active
07087144
ABSTRACT:
A contact assembly for supporting a substrate in an electrochemical plating system, wherein that contact assembly includes a contact ring and a thrust plate assembly. The contact ring includes an annular ring member having an upper surface and a lower surface, an annular bump member positioned on the upper surface, and a plurality of flexible and conductive substrate contact fingers extending radially inward from the lower surface. The thrust plate includes an annular plate member sized to be received within the annular ring member, and a seal member extending radially outward from the plate member, the seal member being configured to engage the annular bump member for form a fluid seal therewith.
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