Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-12-19
2006-12-19
Hollington, Jermele (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C029S825000
Reexamination Certificate
active
07151385
ABSTRACT:
A method of manufacturing a contact probe includes an electroforming step of, using a resist film (522) arranged on a substrate (521) as a pattern frame having a shape corresponding to a contact probe, performing electroforming to fill a gap in the resist film (522) to form a metal layer (526), a tip end shaping step of obliquely removing and sharpening that part of the metal layer (526) which serves as a tip end portion of the contact probe, and a take-out step of taking out only the metal layer (526) from the pattern frame.
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J. P. Rasmussen et al., “Fabrication of an All-Metal Atomic Force Microscope Probe”, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), Jun. 16-19, 1997, Chicago, IL, USA, vol. 1, pp. 463-466.
Haga Tsuyoshi
Hirata Yoshihiro
Nakamae Kazuo
Numazawa Toshiyuki
Okada Kazunori
Fasse W. F.
Fasse W. G.
Hollington Jermele
Nguyen Tung X.
Sumitomo Electric Industries Ltd.
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