Contact printing process

Details Contact printing process Contact printing process

1991-06-14

1992-05-26

Schilling, Richard L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Processing feature prior to imaging

355 53, 355 92, 430311, 430396, G03C 556

Patent

active

051167182

ABSTRACT:
Disclosed is a method for increasing the resolution in contact printing operations by ensuring an intimate contact between the mask and photoresist. A flow of air is directed at the underside of the workpiece being printed while the mask is in place to provide pressure for the necessary contact.

REFERENCES:
patent: 4060235 (1977-11-01), Weikel, Jr.
patent: 4226526 (1980-10-01), Spence-Bate et al.
patent: 4262594 (1981-04-01), Landsman
patent: 4504142 (1985-03-01), Richards
patent: 4810621 (1989-03-01), Akkapeddi et al.
patent: 4903631 (1990-02-01), Morris
patent: 4927733 (1990-05-01), Stout

Affiliated with

Also associated with

Rating

Contact printing process does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Contact printing process, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Contact printing process will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-418955