Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2006-01-03
2006-01-03
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S309000
Reexamination Certificate
active
06982418
ABSTRACT:
The present invention provides a standard test device used for testing a hole of a semiconductor device. The standard test device has a structure which comprises: at least a dummy film on a base surface; at least an insulating layer which has at least one opening penetrating through the insulating layer, so that a part of a top surface of the at least dummy film is shown through the at least one opening, wherein the at least dummy film has a predetermined constant thickness at least around the at least one opening. The standard test device makes it easily possible to determine or measure a thickness of a residual film on a bottom of the contact hole.
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Fab Solutions, Inc.
Quash Anthony
Steinberg Neil A.
Wells Nikita
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