Contact exposure apparatus

Details Contact exposure apparatus Contact exposure apparatus

1985-03-06

1987-03-17

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504922, 378 34, G21K 510

Patent

active

046510095

ABSTRACT:
An apparatus wherein a first thin member and a second thin member, the first thin member bearing a pattern, and the second thin member is exposed to the pattern of the first thin member. It includes a vacuum line for discharging a gas existing between the first thin member and the second thin member without close-contact therebetween, and a device for bringing the first and second members into proximity close-contact with each other after said discharging means discharges the gas from between the first thin member and the second thin member.

REFERENCES:
patent: 4467210 (1984-08-01), Sugihara et al.
patent: 4542298 (1985-09-01), Holden
patent: 4560880 (1985-12-01), Petric et al.

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