Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2008-07-15
2008-07-15
Luu, Thanh X (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
Reexamination Certificate
active
07399950
ABSTRACT:
A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask. The offset pattern of the offset fly lens array is chosen such that spots produced can be recombined into a continuous image, and the system utilizes a time delay and integration charge coupled device for rapid sensing along with an autofocus system that measures and cancels topological features of the specimen.
REFERENCES:
patent: 3597045 (1971-08-01), Mathisen
patent: 4634880 (1987-01-01), Lindow et al.
patent: 4656358 (1987-04-01), Divens et al.
patent: 4677301 (1987-06-01), Tanimoto et al.
patent: 4683524 (1987-07-01), Ohta
patent: 4707610 (1987-11-01), Lindow et al.
patent: 4717242 (1988-01-01), Echizen et al.
patent: 4732473 (1988-03-01), Bille et al.
patent: 4734923 (1988-03-01), Frankel et al.
patent: RE32660 (1988-05-01), Lindow et al.
patent: 4789222 (1988-12-01), Ota et al.
patent: 4806004 (1989-02-01), Wayland
patent: 4806774 (1989-02-01), Lin et al.
patent: 4845356 (1989-07-01), Baker
patent: 5112129 (1992-05-01), Davidson et al.
patent: RE33956 (1992-06-01), Lin et al.
patent: 5184021 (1993-02-01), Smith
patent: 5208648 (1993-05-01), Batchelder et al.
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5231467 (1993-07-01), Takeuchi et al.
patent: 5248876 (1993-09-01), Kerstens et al.
patent: 5264912 (1993-11-01), Vaught et al.
patent: 5276498 (1994-01-01), Galbraith et al.
patent: 5327223 (1994-07-01), Korth
patent: 5363021 (1994-11-01), MacDonald
patent: 5365051 (1994-11-01), Suzuki et al.
patent: 5377001 (1994-12-01), Malin et al.
patent: 5377002 (1994-12-01), Malin et al.
patent: 5389794 (1995-02-01), Allen et al.
patent: 5406085 (1995-04-01), Sharma
patent: 5479252 (1995-12-01), Worster et al.
patent: 5541416 (1996-07-01), Washizuka
patent: 5546189 (1996-08-01), Svetkoff et al.
patent: 5587832 (1996-12-01), Krause
patent: 5596413 (1997-01-01), Stanton et al.
patent: 5602399 (1997-02-01), Muzutani
patent: 5602400 (1997-02-01), Kawashima
patent: 5633720 (1997-05-01), Takahashi
patent: 5654800 (1997-08-01), Svetkoff et al.
patent: 5661548 (1997-08-01), Imai
patent: 5672861 (1997-09-01), Fairley et al.
patent: 5728495 (1998-03-01), Ozawa
patent: 5737084 (1998-04-01), Ishihara
patent: 5854674 (1998-12-01), Lin
patent: 6043932 (2000-03-01), Kusunose
patent: 6091488 (2000-07-01), Bishop
patent: 6248988 (2001-06-01), Krantz
patent: 6867406 (2005-03-01), Fairley et al.
patent: 871052 (1998-10-01), None
Fairley Christopher R.
Fu Tao-Yi
Tsai Bin-Ming Benjamin
Young Scott A.
Kla-Tencor Corporation
Luu Thanh X
Smyrski Law Group, A P.C.
LandOfFree
Confocal wafer inspection method and apparatus using fly... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Confocal wafer inspection method and apparatus using fly..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Confocal wafer inspection method and apparatus using fly... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2767050