Confinement ring support assembly

Details Confinement ring support assembly Confinement ring support assembly

2005-08-09

2005-08-09

Hassanzadel, P. (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential etching apparatus including focus ring...

C156S345530, C156S345510, C156S345520, C118S715000, C118S7230AN, C118S500000, C204S192100, C204S298160, C216S067000, C438S710000, C315S111710, C427S534000, C427S569000

Reexamination Certificate

active

06926803

ABSTRACT:
A confinement ring support assembly for coupling together a plurality of confinement rings in a plasma processing chamber. The confinement ring support assembly includes a post having first end and a second end. The post further includes a first lip having an associated first sliding surface, and a second lip having an associated second sliding surface. The first lip is disposed at a first position on the post, the second lip being disposed at a second position at a different arc relative to the first location on the post, the second position being disposed between the first position and the first end along a longitudinal axis of the post. The confinement ring support assembly further includes a first washer configured to move slidably from the first lip past the second lip toward the first end of the post. The first washer has a first cut formed in its interior opening that is configured to engage with the first lip to prevent the first washer from sliding past the first lip in a direction away from the first end and to engage with the first sliding surface associated with the first lip to constrain a rotational movement of the first washer as the washer moves longitudinally along the post.

REFERENCES:
patent: 5534751 (1996-07-01), Lenz et al.
patent: 5998932 (1999-12-01), Lenz
patent: 6019060 (2000-02-01), Lenz
patent: 6178919 (2001-01-01), Li et al.
patent: 6350317 (2002-02-01), Hao et al.
patent: 6416084 (2002-07-01), Mantyla
patent: 6492774 (2002-12-01), Han et al.
patent: 6527911 (2003-03-01), Yen et al.
patent: 6602381 (2003-08-01), Lenz
patent: 6744212 (2004-06-01), Fischer et al.
patent: 2002/0121500 (2002-09-01), Annapragada et al.
patent: 2003/0029567 (2003-02-01), Dhindsa et al.

Affiliated with

Also associated with

Rating

Confinement ring support assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Confinement ring support assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Confinement ring support assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3451931